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Measurement of lithographic structures
Lithography is one of the central methods for manufacturing integrated circuits and other products. Distances, radii, angles as well as mould and position deviations are measured. The requirements for measurement uncertainty are in the medium to high range. The measurement time requirements are high, as measurements are usually taken during the process.
Lithography is one of the central methods for manufacturing integrated circuits and other products. Distances, radii, angles as well as mould and position deviations are measured. The requirements for measurement uncertainty are in the medium to high range. The measurement time requirements are high, as measurements are usually taken during the process.
For more information on Measurement of lithographic structures talk to WERTH METROLOGY
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