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EDX, WDX analysis (good first option).
Quantitative spectra and chemical mapping.
Lateral resolution limited to ~1 micron.
Auger analysis: Quantitative spectra and imaging.
Excellent lateral resolution (0.1 microns) for small area analysis.
Metallic Contaminants
VPD-ICPMS (or VPD-TXRF). Detection limits of ~1e7 atoms/ cm2 (ppb range).
All elements including the light species (e.g. Li, Na, Ca, K, Al).
VPD-ICPMS allowing the analysis for the entire range the periodic table in a single run (cf. TXRF using several runs).
SIMS (near surface and bulk) impurities & gaseous species.
Organic Contaminants
TOF SIMS: “Relative" quantification and high resolution chemical imaging.
Retrospective extraction of “spectra” from “individual pixels” in imaging mode.
Ideal for detection of sub monolayer organic and inorganics.
Sensitivity ppm – ppb range.
XPS: Quantitative technique providing “chemical state” information and imaging.
Detection limits ~0.1 atom %.
Sub Surface Defects & Contaminants
Cross Sectional microscopy (TEM) analysis.
Combined with electron diffraction and EELS mapping.
FIB analysis.
SEM, EDX & WDX
FTIR & Raman analysis.
TOF SIMS depth profiling.
High sensitivity, parallel detection.
For more information on Organic Contaminant Analysis talk to Aystorm Scientific Ltd
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