Focussed Ion Beam (FIB) milling

TEM-FIB Transmission Electron Microscopy requires the provision of an "electron transparent" specimen. Using an energetic (200-300 keV) beam of electrons, magnified and focused to produce high resolution images in either cross section or plan view. The same electrons can also be used to provide diffraction patterns revealing crystallographic structural information, texturing and preferred orientations. The production of suitable TEM specimens (lamellae) requiresthe use of either Focussed Ion Beam (FIB) milling, or conventional ion beam polishing techniques. FIB preparation is advantageous for the accurate preparation of lamellae from small, localised features within the sample eg. isolation of individual precipitates or gate structures. The trade off with the FIB technique is the increased depth of ion beam damage, meaning that conventional ion beam polishing techniques are preferred when preperation from a small, local region is not critical.

For more information on Focussed Ion Beam (FIB) milling talk to Aystorm Scientific Ltd