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Nuclear Reaction Analysis (NRA)
RBS is insensitive for the measurements of light elements since its sensitivity is a function of Z2. The measurement of light elements thus requires alternative techniques such as Nuclear Reaction Analysis (NRA) or Elastic Recoil Detection Analysis (ERDA). In NRA one measures the yield of the various nuclear fragments resulting from various resonant reactions resulting from energetic He or H reactions with the host atoms. The applications include accurate and absolute determination of N and O in thin oxynitrides.

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