Auger Depth Profiling

Auger Electron Spectroscopy (AES) Auger analysis is usually carried out by bombardment of the surface of a sample with a focused beam of electrons. This gives rise to the emission of energetic electrons (50 eV – 3 keV) from an excited atom after a series of internal relaxation effects, known as “Auger electrons“. The intensity and energy distribution of these electrons are recorded in the experiment and usually displayed in a derivative mode. Auger depth profiling is also possible by recoding the intensity of the Auger signals as a function of sputter erosion depth. Quantification of the major and minor elements are also possible by using the appropriate Auger relative sensitivity factors, with detection limits of ~0.1 atomic %. However, this method is not best suited for the analysis of insulating layers due to charging effects. Scanning Augers Microscopy (SAM) produces high resolution chemical maps which have important applications in identifying the precise chemical nature of particles or small features.

For more information on Auger Depth Profiling talk to Aystorm Scientific Ltd