Residual Gas Analysers Vaccum Diagnostics

The HPR-30 Series are residual gas analysis systems configured for analysis of gases and vapours in vacuum processes and for vacuum diagnostics with sampling capability from high vacuum to atmospheric pressure. The systems are fully configurable for individual process applications such as CVD, ALD, plasma etching, MOCVD, process gas purity and in-process contaminant monitoring.

For more information on Residual Gas Analysers Vaccum Diagnostics talk to Hiden Analytical Ltd