ICP Plasma Workstation with EQP Ion Mass / Energy Analyser

Combined mass / energy analysis of all species in your RF plasma process •Plasma / Reactive ion Etch Studies•CVD / PVD / MOCVD•Surface modification•Vacuum / Plasma Processing•Plasma cleaning / sterilisation•Thin film manufacture / modification•Composite manufacture / modification The Hiden Plasma Workstation, an integrated RF-ICP reactor / plasma analyser system for all you plasma process studies, featuring: •Cylindrical quartz cell 100mm diameter.•4 turn copper induction coil with coil cooling facility and 100mm coil adjustment.•13.56MHz RF generator with up to 200W power with matching network.•RF screen (440 x 340 x 340 mm).•Air cooling, manual or automatic Dual stream flow control.•Twin Turbo molecular pumping manifold for differential operation.•Capacitance pressure gauge and cell pressure display.•Hiden EQP 500 plasma analyser with 100mm Z shift operating under MASsoft O/S.•Mass / Energy analyser for positive & negative ions, neutrals, and radicals.

For more information on ICP Plasma Workstation with EQP Ion Mass / Energy Analyser talk to Hiden Analytical Ltd