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HAL 3F Mass Spectrometers
Triple Filter Quadrupoles for Precision Gas Analysis and Scientific Applications. •Surface Science•Molecular Beam Studies•UHV Temperature Programmed Desorption•High Performance RGA•Cluster Studies•Leak Detection / Virtual Leaks•Desorption / Outgassing studies / Bakeout cycles•Chamber / Process gas Contaminants Hiden HAL 3F mass spectrometers for high precision scientific, process applications and UHV applications, featuring: •High Sensitivity, enhanced detection from 100% to 5ppb.•Mass range options to 2500 amu with Automatic mass scale alignment.•Enhanced long-term Stability (less than ±0.5% height variation over 24 h).•Ion source control for soft ionisation and appearance potential mass spectrometry.•Enhanced sensitivity for high mass transmission, 6, 9 or 12 mm pole diameter options.•Available with a wide choice of integral ioniser configurations, e.g. low profile, XBS.•Enhanced contamination resistance via the RF-only pre-filter stage.•Temperature reading integrated into data displays for thermal desorption applications.•Pulse Ion Counter detector option for continuous 7 decade dynamic range.•MASsoft control via RS232, RS485 or Ethernet LAN.

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