Ultra Pure Chemical Dispense Modules

CPS was contracted to design, fabricate, install and commission Ultra Pure Chemical Dispense modules for a major new Electronics facility in Germany. Seven units were designed and installed to handle a range of Acids, Alkali’s and Solvents from 200 Litre drums to the tools in the cleanroom. The units were manufactured in White Polypropylene with Stainless Steel and PFA pumps and pipework. Each system holds two 200 litre chemical drums with continuous level measurement and auto changeover of drums. The units are fitted with an ultra pure filtration system to recirculate and polish the chemicals prior to automatic transfer to the tools. ‘Keyed’ drum connection heads are utilised on each CDM to ensure chemical compatibility and purity. All the systems are controlled from a PLC and touch screen HMI with all alarms connected to the Factory BMS system. All solvent units are fitted with Atex rated pumps and controls.

For more information on Ultra Pure Chemical Dispense Modules talk to Chemical Process Solutions Ltd