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Innovative SIMS-on-a-Flange
13-01-2010
Hiden Analytical Announce Innovative SIMS-on-a-Flange
Hiden Analytical announce the introduction of a
complete, compact SIMS facility conveniently
mounted on a single UHV Conflat-type flange. The
new system, aptly named SIMS-on-a-Flange, allows
users to quickly install a complete SIMS resource on
existing vacuum and process chambers with no
major reconstruction or alignment issues.
SIMS (Secondary Ion Mass Spectrometry) is a high
sensitivity surface analysis technique for the
determination of surface composition, for
contaminant analysis, and for depth profiling in the
uppermost surface layers of a sample. Applied to
analyses extending from a few Angstroms up to a
micron in depth, surfaces are analysed by species
and by abundance, layer by atomic layer.
The system comprises the analytical-grade quadrupole mass spectrometer with integral energy filter, the
fine-focus oxygen gas-sourced ion gun, and all necessary software and hardware for system operation,
for ion beam raster scanning, for data presentation and for surface mapping.
Mass range options enable operation from 1 amu to 1000 amu, with ion counting detection of both
positively and negatively charged ions. Standard mounting flanges are DN-150-CF (6-inch port size) and
DN-200-CF (8-inch port size) dependent on options.
For further information on this or other Hiden products please contact Hiden Analytical by email at
info@hiden.co.uk or visit the main website at www.HidenAnalytical.com.
For more information on Innovative SIMS-on-a-Flange talk to Hiden Analytical Ltd
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