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Hiden Analytical is proud to present the ESPion Series, a cutting-edge line of Langmuir probes specifically designed for plasma diagnostics. These bolt-on plasma process analyzers offer rapid response times and high sensitivity for precise analysis of plasma parameters.

 

Equipped with ESPionSoft, Hiden's comprehensive software package, controlling the ESPion system becomes effortless, providing real-time insights into plasma stability and reproducibility. The software includes an automatic extrapolation feature that continuously generates detailed information on various plasma properties. With ESPion, you can calculate a wide range of parameters, including plasma potential, floating potential, electron temperature, electron energy distribution, ion density, and ion flux. Moreover, the system allows synchronization with an external plasma power supply for time-resolved measurements, making it ideal for pulsed plasma research like HiPIMS.

The ESPion systems come with a variety of standard sampling options to accommodate diverse plasma applications such as ECR, HiPIMS, Magnetron Discharge, Helicon Source, DC Glow Discharge, Pulsed Plasma, and Laser ablation. Probes are equipped with wideband RF compensation using Hiden's innovative multi-inductor chain. For high-temperature applications, the probes feature integral gas cooling, ensuring accurate measurements even in challenging environments. The software also incorporates automated self-cleaning cycles to limit probe tip contamination. Optional upgrades include flexible and articulated probes, as well as fully automated z-drives for spatially resolved measurements. For pulsed deposition processes, the ESPion series offers time-resolved measurements with an impressive time resolution of up to 50 ns.

 

The ESPion series is designed to provide a comprehensive, versatile, and powerful solution for monitoring plasma parameters across various aspects of plasma analysis, enabling precise characterization and uniformity measurements. Trust Hiden Analytical's ESPion Series to elevate your plasma diagnostics to new heights.

For more information on Introducing the ESPion Series: Advanced Langmuir Probes for Plasma Diagnostics by Hiden Analytical talk to Hiden Analytical Ltd

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