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Specifically developed for research in fundamental plasma physics, the Hiden Analytical range of plasma
diagnostic tools is now extended with the addition of the new PSM plasma monitor. The family now
comprises two mass spectrometer systems - the PSM and EQP II - together with the Espion Langmuirstyle
plasma probe.
The mass spectrometers provide measurement of
plasma ion and neutral species, with the integrated
energy filter enabling measurement of the energy of
each plasma ion type. The PSM system is
configured to provide measurement of positive ions,
with the EQP II system providing both positive and
negative ion measurement. A comprehensive range
of accessories includes single, double and triplestage
pressure reduction systems for addressing
sampling from process pressures from millitorr to
atmospheric, mass range options to 1000amu,
measurement of ion energies to 1000eV, and
comprehensive magnetic shielding.
The Hiden Espion Langmuir probe provides both static and spacial measurement of the primary DC and
RF plasma parameters including ion density, electron density, electron temperature distribution and plasma
uniformity. Probes are supplied with optional lengths up to 1.2M, and linear motion drives with travel up
to 0.9M. Both the probe and the linear drive operation are fully programmable.
All systems feature state-of-art control with integrated timing and gating circuits and sub-microsecond
response for optimum characterisation of pulsed plasma processes.
For further information on this or other Hiden products please contact Hiden Analytical at info@hiden.co.uk
or visit the main website at www.HidenAnalytical.com
For more information on Extended Family of Diagnostic Tools for Electrical Plasma talk to Hiden Analytical Ltd
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